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Equipment Details

Name of the Equipment
Sony EL Camera 4
Group
Module Reliability
Category
clean
Operator
System Owner
Pavan Fuke
204076012@iitb.ac.in

Make / Model
InformationNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNCPRE Module Lab-1
AMC Required
Local Dealer

Actual Dealer

SOP SOP/139_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No3589
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets available
*Based on stock availability
Precursor/ Target loaded inside tool1
Target dimension
Gases allowed
Contamination remarks